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A silicon wafer has 100 nm of oxide it and is inserted in a furnace at a temperature above 1000°C for further oxidation in dry oxygen. The oxidation rate | |
A. | is independent of current oxide thickness and temperature [Wrong Answer] |
B. | is independent of current oxide thickness but depends on temperature [Wrong Answer] |
C. | slows down as the oxide grows [Wrong Answer] |
D. | is zero as the existing oxide prevents further oxidation [Correct Answer] |